National Institute of Technology Rourkela

राष्ट्रीय प्रौद्योगिकी संस्थान राउरकेला

ଜାତୀୟ ପ୍ରଯୁକ୍ତି ପ୍ରତିଷ୍ଠାନ ରାଉରକେଲା

An Institute of National Importance

Syllabus

Course Details

Subject {L-T-P / C} : ME6535 : Vacuum Technology { 3-0-0 / 3}

Subject Nature : Theory

Coordinator : S. Anbarasu

Syllabus

Module 1 :

Module 1: Basic Theory [ 8 hours]
Gas kinetic theory, pressure, conductance, gas flow regimes, vapour pressure, pumping speed, throughput. Gas surface interactions: physisorption, chemi-sorption, condensation.
Module 2: Vacuum Pumps: [9 hour]
Mechanical, diffusion, molecular drag, turbo molecular, cryopumps, ion pumps - general working principles, operating regimes.
Module 3: Vacuum Instrumentation: [8 hour]
Vacuum gauges, gas regulators, flow meters, residual gas analyzers, interpretation of data.
Module 4: Design Concepts: [6 hour]
Materials, chambers, components, joins, seals, valves. Overall system design and integration. Problem Solving: Leak detection and detectors, gas signatures.
Module 5: Vacuum Applications: [5 hour]
Freeze drying, packaging, vacuum coating, microelectronics, particle accelerators, distillation, metallurgical processes, television and X-ray tubes, cryogenic insulation, space simulation.

Course Objective

1 .

To understand that what is vacuum technology and why is it required.

2 .

To gain the knowledge of the gas kinetic theory in vacuum pressure.

3 .

To gain the knowledge on production and measurement of vacuum at different vacuum levels

4 .

This course will provide a wide knowledge on the different vacuum applications and its importance.

Course Outcome

1 .

CO1: Knowledge will be gained on the subject matter related to vacuum
CO2: Able to apply the theory of gases in low pressure and their influences.
CO3: Recognize the various vacuum pumps and their operation at different vacuum levels.
CO4: Able to use the different measuring instruments at low pressures.
CO5: Knowledge will be enhanced to implement the concept for product development.

Essential Reading

1 .

V.V. Rao, T.B. Ghosh, K.L. Chopra,, Vacuum Science and Technology, Allied Publishers Ltd., New Delhi, 2021

2 .

A. Roth, Vacuum Technology, North Holland Publishing Comp, 2012, ,any, Amsterdam

Supplementary Reading

1 .

M. H. Hablanian, H. H. Hablanian, High-vacuum Technology: A Practical Guide, 2nd Edition, CRC Press, 1997

2 .

Pramod K. Naik, Vacuum: Science, Technology and Applications, CRC Press, Taylor & Francis Gro, 2020