Course Details
Subject {L-T-P / C} : EE6149 : Nanoelectronics and MEMS { 3-0-0 / 3}
Subject Nature : Theory
Coordinator : Prof. Prasanna Kumar Sahu
Syllabus
Shrink-down approaches of Transistors: Introduction, CMOS Scaling, The nanoscale MOSFET, FinFETs, Vertical MOSFETs, limits to scaling, system integration limits (interconnect issues etc.), Resonant Tunneling Transistors, Single electron transistors, new storage, optoelectronic, and spintronic devices. Atoms-up approaches: Molecular electronics involving single molecules as electronic devices, transport in molecular structures, molecular systems as alternatives to conventional electronics, molecular interconnects Carbon nanotube electronics, band structure & transport, devices, applications.
Historical Background: Silicon Pressure sensors, Micromachining, Microelectromechanical Systems. Microfabrication and Micromachining : Integrated Circuit Processes, Bulk Micromachining : Isotropic Etching and Anisotropic Etching, Wafer Bonding, High Aspect-Ratio Processes (LIGA) Physical Micro Sensors: Classification of physical sensors, Integrated, Intelligent, or Smart sensors, Sensor Principles and Examples: Thermal sensors, Electrical Sensors, Mechanical Sensors, Chemical and Biosensors. Micro Actuators: Electromagnetic and Thermal microactuation, Mechanical design of microactuators, Microactuator examples, microvalves, micropumps, micromotors Microactuator systems: Success Stories, Ink-Jet printer heads, Micro-mirror TV Projector etc.
Course Objectives
- Students earn the basic understanding of nano <br />electronics and followed the advanced understanding of the nano-micro fabrication
- provides advanced level of understanding to the device electronics for integrated circuits, a foundation <br />for the device fabrication and various application in the field of sensors technology,optoelectronics, communication and nanotechnology etc.
- Learning of design of MEMS transducers and to explore design <br />tradeoffs, circuit/system issues, device performance, and manufacturing of microsystem
Course Outcomes
o Students will understand the divers electronic device fabrication. <br />o Students will have in-depth technical knowledge in one or more areas of specialization. <br />o Students will have practical understanding of the major engineering concepts and <br />demonstrate application of their theoretical knowledge of the concepts and help to get <br />the academic and industrial jobs. <br />o Students will be able to interact scientifically with industry both within and outside of a <br />classroom setting. <br />o Students will develop an appreciation of continuing educational and professional <br />development. <br />o Students will appreciate their role as engineers in society.
Essential Reading
- Waser Ranier, Nanoelectronics and Information Technology Advanced Electronic Materials and Novel Devices, John Wiley & Sons , 2014
- John H. Davies, The Physics of Low-Dimensional Semiconductors, Cambridge University Press , 2012
Supplementary Reading
- Marc Madou, Fundamentals of Microfabrication, CRC Press , 1997
- M-H. Bao, Micromechanical Transducers: Pressure sensors, accelerometers, and gyroscopes, Elsevier, New York , 2000