Module I: Introduction to MEMS and BioMEMS

• Overview of MEMS and BioMEMS: Definitions, historical background, and significance.
• Silicon Microfabrication: Materials, fabrication methods, and techniques.
• Soft Substrate Microfabrication: Materials and fabrication methods specific to soft substrates.
• Biomedical Applications of MEMS Devices: Key applications and examples.
• Emerging Devices and Applications: New developments and innovative uses.
• Limitations of MEMS and BioMEMS: Challenges in design, fabrication, and application.


Module II: Fundamentals of MEMS

• Principles and Fabrication Technologies: Introduction to core MEMS principles and methods.
• MEMS Structures and Materials: Overview of basic structures and materials used in MEMS.
• Design, Fabrication, and Packaging: Key considerations in the MEMS development process.
• Characteristics of Microstructures:
Mechanical properties
Electrical characteristics
Optical attributes
Biochemical and fluidic properties

Module III: Microfabrication Techniques

• Concepts and Types of Microfabrication:
Thin Film Deposition
Lithography Methods: Photolithography, E-Beam Lithography, X-ray Lithography, Soft Lithography
Etching: Dry and wet etching techniques
Wafer Bonding
Bulk and Surface Micromachining
LIGA Process (Lithography, Electroplating, and Molding)
• Examples of MEMS and BioMEMS Devices: Practical applications and case studies.
• Introduction to Biosensors:
Basic Elements and Design
Fabrication Techniques and Materials
Types and Principles of Biosensors
• Lab-on-a-Chip (LoC):
Components: Microsensors, lenses, heaters, and actuators.
Minimally invasive biomedical devices.
Future prospects of LoC technology.

Module IV: BioMEMS for Clinical Detection

• Micro and Nano Fabrication for Biochips and LoC:
Fundamentals and techniques.
Principles of molecular recognition and bio-immobilization.
• On-Chip Biochemical Detection:
Methods and technologies.
• Introduction to Micro/Nanofluidics:
Basic concepts and applications.
• Integration of Lab-on-a-Chip Components: Sensors, microfluidic channels, and other system elements.


Module V: Biosensors and Biochips

• Fundamentals of Biosensors:
Basics of electrochemistry and electrochemical biosensors.
• Microfluidic Devices and Systems: Role in biomedical applications.
• MEMS Sensors and Actuators: Medical instrumentation uses.
• Bioelectronics:
Fundamentals of biosignal conditioning and processing.
• Biosensors for Health:
Applications in diabetes, cardiovascular diseases, and cancer detection.
• MOSFET Biosensors:
Basic principles and examples of use.
• Ion Exchange Membrane Electrodes and Enzyme Electrodes: Applications in diagnostics.

To aware the students about the fundamental principles of microsystems (MEMS and BioMEMS).

To provide the concepts essential for designing lab-on-a-chip and Point-of-care devices for biomedical applications.

To provide the concept of Biosensors, uses, design, and development for advanced research level so that students would be comfortable in higher studies.

To Hands-on experience in in-house microfabrication (Photolithography) and Hands-on experience in fabricating simple LoC devices.

After completing the course, the students will be able to:

1. know the various MEMS design and fabrication techniques for Biosensors. Explore the concepts of BioMEMS & its application in healthcare.

2. Ability to identify basic requirements for a design application related to microfabrication and its techniques for biomedical systems.

3. To develop the skill to realize, build, and get hands-on experience fabricating simple LoC devices.

4. To analyze, compare, and appreciate the performance and merit of different lab-on-a-chip concepts, designs, and modes of work.

5. To know the different biosensors for biomedical applications, analyze, compare, and appreciate the performance and merit of different and point-of-care devices' concepts, importance, design, and work mode.

Tai Ran Hsu, MEMS and Microsystems Design and Manufacture, Tata McGraw Hill

Wanjun Wang, Stephen A.Soper, BioMEMs: Technologies and Applications, CRC Press

Cooper J.M, Biosensors, Oxford publication

Gerald A Urban, BioMEMS, Springer