Module 1: Introduction to Microsystems and its applications: Evolution of microelectronics MEMS materials and their properties: Silicon, GaAs, Quartz, Polymers, Smart materials and their mechanical, electrical properties, thin films for micro and nano technologies, Wafer preparation Scaling Laws. (8 hours)

Module 2: Micromachining Technology: MEMS fabrication process: Diffusion, Deposition: Oxidation, Evaporation, Sputtering, CVD Lithography: fundamentals, photoresists, lithography processes, Types: Optical, Electron-beam, focused ion beam, X-ray, LIGA process Etching: bulk and surface micro-machining isotropic and anisotropic, wet and dry etching, reactive ion etching and deep reactive ion etching. Wire bonding, packaging and testing- micro-assembly, reliability studies. (12 hours)

Module 3: Transduction mechanism for MEMS devices: Electrostatic, thermal, magnetic etc. Micro Sensors: Thermal sensors, Radiation sensors, Mechanical sensors, Inertial sensors. (8 hours)

Module 4: RF-MEMS: RF MEMS switch, MEMS-Capacitor, MEMS-Inductor, MEMS based antenna, MEMS Phase shifters. (8 hours)

Module 5: Modern applications of MEMS: Energy harvesting and Biomedical applications, BioMEMS and Biosensors. (4 hours)

To develop an ability, enthusiasm critical thinking in micro-engineering process, materials, and design issues.

To develop the fundamental concepts of MEMS technology & their applications in different areas.

To study various sensing and transduction techniques.

To develop an ability and understanding of micro-scale physics for use in designing MEMS devices.

After the completion of this course, students will be able to:

CO1: understand knowledge on fundamental principles and concepts of MEMS technology.
CO2: describe the various fabrication techniques in MEMS technology using silicon, polymer, metal and other materials.
CO3: apply the knowledge of sensing and transduction mechanisms to design different MEMS devices.
CO4: evaluate and judge the performance of the different MEMS devices.
CO5: identify the necessity of fabrication steps of the different MEMS devices.

G. K. Ananthasuresh, K. J. Vinoy, and S. Gopalakrishnan, Micro and Smart Systems, Wiley

Chang Liu, Foundations of MEMS, Pearson Education , 2nd Edition

M. Madou, Fundamentals of Microfabrication, CRC Press

J.W Gardner, Micro sensors, MEMS and Smart devices, John Wiley & sons

Microsystem Technologies

Journal of Microelectromechanical Systems