Course Details
Subject {L-T-P / C} : PH6572 : Semiconductor Device Fabrication Laboratory { 0-0-3 / 2}
Subject Nature : Practical
Coordinator : Jyoti Prakash Kar
Syllabus
| Module 1 : |
Familiarization to clean environment, wafer and microcircuits demonstration |
| Module 2 : |
Growth of SiO2 layer on silicon wafer using dry and wet oxidation methods |
| Module 3 : |
Fabrication of PN junction using solid source of dopants |
| Module 4 : |
Fabrication of Ohmic and Schottky contact electrodes |
| Module 5 : |
Post-growth thermal treatment of semiconducting materials |
| Module 6 : |
Transfer of micropattern on wafer surface by photolithography |
| Module 7 : |
Etching of metal and dielectric layers at various temperatures |
| Module 8 : |
Anisotropic etching of silicon for MEMS |
| Module 9 : |
Wire bonding of semiconductor devices |
| Module 10 : |
Fabrication of microelectronic devices (thin film transistor/ flexible device/ photodetector/ microheater) |
Course Objective
| 1 . |
To impart knowledge on basic CMOS process flow |
| 2 . |
Operating principle of equipment related to IC fabrication |
| 3 . |
Cleaning and handling of semiconductor wafers |
| 4 . |
Control of process parameters |
Course Outcome
| 1 . |
At the end of course, students will be able to get hands-on training in fabrication of semiconductor devices |
| 2 . |
Predict systems integration issues |
| 3 . |
Propose methods for integration |
| 4 . |
Integrate the operation principles |
| 5 . |
Design architectures and optimize the manufacturing process |
Essential Reading
| 1 . |
Laboratory Manual, Laboratory Manual, Laboratory Manual , Laboratory Manual |
| 2 . |
G. S. May, S. M. Sze, Fundamentals of Semiconductor Fabrication, John Wiley & Sons Inc. , (2007) |
Supplementary Reading
| 1 . |
J. D. Plummer, M. D. Deal, P. B. Griffin, Silicon VLSI Technology: Fundamentals Practice and Modeling, Pearson , (2009) |
| 2 . |
P. V. Zant, Microchip Fabrication: A Practical Guide to Semiconductor Processing, McGraw -Hill , (2013) |
Journal and Conferences
| 1 . |