Syllabus

(4 hours)
Introduction: Laboratory vs Industrial production, Importance of large scale integration, Reproducibility, Reliability of semiconductor Devices, Future trends and challenges

(8 hours)
Clean room: Clean room type, Maintenance of clean room, Testing of clean room standard, DI water specification, Production of DI water, Testing of DI water, Fabrication of large ingots and wafers, Handling of large wafers, Wafer Types, Inspection of wafer, Types of Masks, Production of Mask, Mask handling and storage, Mask inspection, Reduction of contaminants

(8 hours)
Process integration: Process modelling, Process flow, Process optimization, Product inspection, Quality control, Failure analysis, Precautions for IC processing, Advanced materials and technology, Low dimensional materials, High-k dielectrics, Nondestructive testing, Integration challenges, Industrial R&D, Advanced semiconductor technology and related process, Advanced packaging

(8 hours)
System operation: High end manufacturing systems, System customization, Manual operation vs auto control, Data acquisition and analysis, System failure, System service and maintenance, System compatibility for future technology

(8 hours)
Safety: Industrial safety, Electrical safety, Thermal safety, Chemical safety, Toxic gas Safety, Bio safety, Safety from airborne particulates, Hazard identification and safety precautions, Personal protective equipment (PPE)

To impart knowledge on industrial production of semiconductor devices

Advanced technology to meet the future requirements The available technologies

Advanced system and their operating principles

Safety precaution from hazardous process environments

At the end of course, students will be able to understand the approach for industrial production of the semiconductor devices

Optimize large scale integration process for industry

Synthesize and characterization of futuristic advanced materials for industrial applications

Get adequate information on industrial safety and precautions

G. S. May, C. J. Spanos, Fundamentals of Semiconductor Manufacturing and Process Control, Wiley-IEEE Press , (2008)

J. M. Sherer, Semiconductor Industry: Wafer Fab Exhaust Management, Taylor & Francis , (2005)

R. A. Bolmen, Semiconductor Safety Handbook: Safety and Health in the Semiconductor Industry, William Andrew , (1998)

H. Geng, Semiconductor Manufacturing, McGraw-Hill Inc. , (2017)

Y. S. Song, L. R. Thoutam, S. Tayal, S. B. Rahi, T. S. Arun Samuel, Handbook of Emerging Materials for Semiconductor Industry, Springer Nature , (2024)