Syllabus

(2 hours)
Introduction: Microelectromechanical systems (MEMS), Developing markets, History of MEMS, Intrinsic characteristics of MEMS

(8 hours)
Operating principles of MEMS: Electrostatic, Chemical, Biological, Thermal, Piezoelectric, Piezoresistive, Acoustic, Magnetic, Optical, Elasticity; Micromachined devices: Microactuators, Micromotors, Micropumps, Microtip, Microgrippers, Microconveyer belt, Microswitches, Microphones, Micromirrors, Digital light modulators

(5 hours)
MEMS sensors: Pressure sensor, Strain gauges, Inertial sensors, Flow sensors, Tactile sensors, Infrared sensors, Gas microsensors, Accelerometer, Positional sensors, Gyroscope

(3 hours)
MEMS materials and their characteristics: Single crystal silicon, Polycrystalline silicon, Quartz, Lead zirconate titanate (PZT), Aluminum nitride, Zinc oxide, Polyimide, SU-8, Liquid Crystal Polymer, Polydimethylsiloxane (PDMS), Polymethyl methacrylate (PMMA), Parylene, Fluorocarbon, Polyvinylidene fluoride

(8 hours)
MEMS process: Modeling and design, Scaling of MEMS devices, Wafer bonding, Front to back alignment, Stereolithography, Lithographie galvanoformung abformung (LIGA), Micromachining, Surface micromachining, Sacrificial layer, Residual stress, Stiction and antistiction methods, Bulk micromachining, Etchants, Isotropic wet etching, Deep reactive ion etching (DRIE), Gas-phase etchants, Control of etching rate

(5 hours)
Integration with electronics: Dicing and die separation, Pick and place, Die attach, Interconnection, Encapsulation and packaging, Calibration, Characterization techniques of MEMS, Quality and Reliability of MEMS

(5 hours)
MEMS types: Micro-optoelectromechanical systems (MOEMS), Flexible MEMS, BioMEMS, Nano-electromechanical systems (NEMS) and applications

To impart knowledge on science and technology of MEMS

Materials used in MEMS

Basic approaches for various MEMS design

Working principles and applications of MEMS

At the end of course, students will be able to understand the operating principle of MEMS

Design the MEMS for specific application

Select appropriate materials for MEMS fabrication

Optimize the MEMS fabrication process flow

Characterize and analyze the performance of MEMS

C. Liu, Foundation of MEMS, Pearson Education , (2011)

E. S. Kim, Fundamentals of Microelectromechanical Systems (MEMS), McGraw Hill , (2021

P. Pal, K. Sato, Silicon Wet Bulk Micromachining for MEMS, Pan Stanford Publishing , (2017)

J. W. Gardner, V. K. Varadan, O. O. Awadelkarim, Microsensors, MEMS and Smart Devices, Taylor and Francis , (2000)

M. Gad-el-Hak, The MEMS Handbook, CRC press , (2001)

M. Tilli, M. Paulasto-Kröckel, M. Petzold, H. Theuss, T. Motooka, V. Lindroos, Handbook of Silicon Based MEMS Materials and Technologies, Elsevier , (2020)

T. R. Hsu, MEMS and Microsystems: Design and Manufacturing, John Wiley & Sons , (2008)

S. D Senturia, Microsystem Design, Springer , (2000)

P. Rai-Choudhury, MEMS and MOEMS: Technology and Applications, PHI Learning , (2012)