Syllabus

Module 1: (8 hours)
Vacuum and its necessity, Gas flow in vacuum systems, Pumping speed and through put.

Module 2: (9 hours)
Creation of Vacuum: Rotary vane pump, Roots blower pump, Diffusion pump, Ionization pump, Diaphragm pump, Adsorption pump, Turbo molecular pump.

Module 3: (9 hours)
Measurement of Vacuum: Pirani/Thermocouple gauge, Penning/Ionization Gauge (hot cathode and cold cathode), Capacitance gauge, Bourdon gauge, McLeod gauge.

Module 4: (5 hours)
Quality of vacuum: Residual gas analyzer, Leak detection. Material selection and vacuum chamber.

Module 5: (5 hours)
Application of Vacuum: Thin film deposition, Cryogenics, Industry.

Interpretation of vacuum condition and gas flow.

The creation and utilization of vacuum.

Techniques of vacuum measurement.

Qualitative analysis of vacuum.

5. Application of vacuum

At the end of the course, students will be able to:
CO1: Learn to parameterize vacuum.

CO2: Understand gas response at vacuum conditions.

CO3: Learn vacuum creating methods.

CO4: Learn quantitative and qualitative analysis of vacuum so created.

CO5: Apply the vacuum for scientific and industrial purposes.

A. Chambers, R. K. Fitch and B. S. Halliday, Basic Vacuum technology, Overseas press (1998).

V. V. Rao, T. B. Ghosh and K. L. Chopra, Vacuum Science and Technology, Allied Publishers Pvt Ltd (2012).

J. F. O'Hanlon and T. A. Gessert, A Users Guide to Vacuum Technology, Wiley (2023).

J. M. Lafferty, Foundations of Vacuum Science and Technology, John Wiley and Sons (1998).