National Institute of Technology Rourkela

राष्ट्रीय प्रौद्योगिकी संस्थान राउरकेला

ଜାତୀୟ ପ୍ରଯୁକ୍ତି ପ୍ରତିଷ୍ଠାନ ରାଉରକେଲା

An Institute of National Importance
NIT Rourkela Inside Page Banner

Syllabus

Course Details

Subject {L-T-P / C} : PH3121 : Vacuum Science and Applications { 3-0-0 / 3}

Subject Nature : Theory

Syllabus

Module 1 :

(8 hrs) Vacuum and its necessity, Gas flow in vacuum systems, Pumping speed and through put.

Module 2 :

(9 hrs) Creation of Vacuum: Rotary vane pump, Roots blower pump, Diffusion pump, Ionization pump, Diaphragm pump, Adsorption pump, Turbo molecular pump.

Module 3 :

(9 hrs) Measurement of Vacuum: Pirani/Thermocouple gauge, Penning/Ionization Gauge (hot cathode and cold cathode), Capacitance gauge, Bourdon gauge, McLeod gauge.

Module 4 :

(5 hrs) Quality of vacuum: Residual gas analyzer, Leak detection. Material selection and vacuum chamber.

Module 5 :

(5 hrs) Application of Vacuum: Thin film deposition, Cryogenics, Industry

Course Objective

1 .

To impart knowledge on
Interpretation of vacuum condition and gas flow.

2 .

The creation and utilization of vacuum.

3 .

Techniques of vacuum measurement.

4 .

Qualitative analysis of vacuum.

5 .

The application of vacuum.

Course Outcome

1 .

At the end of the course, students will be able to:
CO1: Learn to parameterize vacuum.

2 .

CO2: Understand gas response at vacuum conditions.

3 .

CO3: Learn vacuum creating methods.

4 .

CO4: Learn quantitative and qualitative analysis of vacuum so created.

5 .

CO5: Apply the vacuum for scientific and industrial purposes.

Essential Reading

1 .

A.Chambers, R.K.Fitch and B.S.Halliday, Basic Vacuum technology, Overseas press (1998).

2 .

V. V. Rao, T. B. Ghosh and K. L. Chopra, Vacuum Science and Technology, Allied Publishers Pvt Ltd (2012).

3 .

Austin Chambers, Modern Vacuum Physics (Master's Series in Physics and Astronomy), CRC PRESS 2024.

Supplementary Reading

1 .

J. F. O'Hanlon and Timothy A. Gessert, A Users Guide to Vacuum Technology, Wiley (2023).

2 .

J. M. Lafferty, Foundations of Vacuum Science and Technology, John Wiley and Sons (1998).

Journal and Conferences

1 .