Syllabus

1. Introduction to MEMS simulation tools like COMSOL and its different modules
2. Design and simulation of microcantilever and finding its mechanical response
3. Simulation with time dependent force on cantilever and obtaining the transient, steady state and frequency response
4. Design and simulation of capacitive MEMS devices
5. Design and simulation of MEMS accelerometer, Pressure sensor and Gyroscopes
6. Design and simulation of magnetic, thermal and piezoelectric MEMS devices
7. Simulation on Microfluidics based devices
8. Experimentation on Thermal Oxidation,
9. Experimentation on sputtering technique
10. Mask making and Pattern transferring using Lithography
11. Familiarization with etching and bulk micromachining
12. Fabrication of microcantilever

To enable students to learn about the simulation and fabrication of different MEMS devices

A graduate will learn about the simulation and hand on experience on MEMS devices and the fabrication process.

G. K. Ananthasuresh, K. J. Vinoy, and S. Gopalakrishnan, Micro and Smart Systems, Wiley

Journal of Microelectromechanical Systems

Microsystem Technologies