Module I [8 h]: Introduction: Introduction, Basic elements of molecular dynamics modelling, Design and requirements for state-of-the-art MD cutting process simulations, Capabilities of MD for nanoscale material removal process analysis, Advances and recent developments in material removal process simulation, Summary. Ductile Mode Cutting of Brittle Materials The mechanism of ductile mode cutting of brittle materials, The chip formation in cutting of brittle materials, Machined surfaces in relation to chip formation mode Diamond Tools in Micromachining Diamond technology, Preparation of substrate, Modified HFCVD process, Nucleation and diamond growth, Deposition on complex substrates, Diamond micromachining.
Module II [7 h]: Conventional Processes: Micro-turning, Micro-drilling and Micro-milling Introduction, Micro-turning, Micro-drilling, Micro-milling, Micro forming, Product quality in micromachining Micro-grinding and Ultra-precision Processes Introduction, Micro and nanogrinding, Nanogrinding tools
Non-Conventional Processes: Laser Micromachining Introduction, Fundamentals of lasers, Laser microfabrication, Laser nanofabrication. Evaluation of Subsurface Damage in Nano and Micromachining Destructive evaluation technologies, Non-destructive evaluation technologies
Module III [7 h]: Micro and Nano Finishing Processes Need for Nano finishing, Magnetic abrasive Finishing, Magnetorheological Finish, Elastic Emission Finishing, Magnetic Float Polishing, Ion Beam finishing.
Micro Joining Challenges, Micro Resistance welding, Ultrasonic welding, Micro TIG, Applications.
Module IV [7 h]: Applications of Nano and Micromachining in Industry Typical machining methods, Applications in optical manufacturing, Semiconductor and electronics related applications.
Introduction to different Biomedical Applications of Microsystems: Delivery of Diagnostic and Therapeutic Agents to Vascular Targets, Real-Time Biological Imaging and Detection, Diagnostic and Therapeutic Applications of Metal Nano shells, Micro devices for Oral Drug Delivery etc. Technology Support, Meeting Social Needs , future scope of micro-nano systems
Module V [7 h]: Micro sensors, Micro actuation, MEMS with Micro actuators, Micro actuators with mechanical Inertia – Micro fluidics, micro/nano biosensors: Classification of physical sensors, Integrated, Intelligent or Smart sensors, Bio sensing Principles and sensing methods, Biosensors arrays and Implantable devices, Innovative Applications on Present Devices: Nano chips, Nanotubes and Nanowires, Integration of chips and microprocessors.

To give awareness of different techniques used in micro and nano machining/manufacturing

To give in-depth idea of the conventional techniques used in micro machining/manufacturing

To get acquainted with micro sensors, actuators, MEMS devices and its various industrial as well as Biomedical Applications

To introduce Micro and Nanofabrication Techniques and other processing routes in Micro and nano machining/manufacturing

CO1. The course will enable the students to know the basic concepts of and principles of Micro and nano systems
CO2. The course will impart fundamental knowledge of micro and nano fabrication processes to the students.
CO3. This course will help students to know about working principles and applications of micro sensors/micro actuators.
CO4. This course will help students to know the advance applications of micro-nano systems to various critical applications such as biomedical, microfluidics etc.
CO5. The course will enable the student to determine the attributes of components for betters efficiency

J. Paulo Davim, Mark J. Jackson, Nano and Micromachining, Wiley , 2022

Mark. J. Jackson, Micro and Nano-manufacturing, Springer , 2020

Tai-Ran Hsu, MEMS and MICROSYSTEMS, Wiley , 2023

Nitaigour Premchand Mahalik, Micro-manufacturing and Nanotechnology, Springer , 2021